Xactix, Inc. (Acquired by SPTS Technologies)
XACTIX, Inc. develops and produces equipment for manufacturing micro electromechanical systems (MEMS). Manufacturing MEMS devices requires adding new manufacturing steps to the standard IC process. These new steps require new, specialized equipment to maximize yield and productivity. XACTIX leverages its unique combination of expertise in instrument and equipment design, semiconductor materials processing, micro machining and fabrication, and MEMS manufacturing to design and build leading-edge MEMS process equipment.